Application case of ball screw drive module in semiconductor industry
Publish Time: 2023-10-12 Origin: Site
Accuracy is undoubtedly an important factor when assembling precision parts,such as in the semiconductor industry,where high repetitive positioning accuracy is necessary to allow assembly systems to operate efficiently and produce high-quality products.The ideal solution for this application is a module system with ball screw drive.
ALM's line module product family includes several models of linear tables for high-precision translation. These systems use anodized extruded aluminum profiles and linear guides with circulating balls,and are driven by ball screws with positioning accuracy up to 10 µm(micron)and repeated positioning accuracy up to ±5 µm(micron).All mounting and reference surfaces are machined with high precision.This level of accuracy is unmatched by any synchronous belt or rack-and-pinion drive module system.