ALM linear motor is widely used in semiconductor chip measurement equipment.In the process of chip manufacturing,various thin films need to be deposited continuously.Generally,a chip will have dozens of thin film structures,and the thickness,reflectivity and uniformity of the thin film will have a key impact on the result of wafer image processing,and accurate measurement is required. 

Among them,the film thickness and key size measurement equipment are all high-end devices of the semiconductor front,which have higher requirements for the mechanical and motion accuracy of the motion table,speed volatility and stability at low speed,and dust-free environment level(or high vacuum).

ALM has extensive industry experience and high industry recognition in semiconductor industry solutions.From the motor design, platform mechanical structure,electrical control,isolation system,software algorithm to provide customers with customized solutions.ALM's patented MTF series linear motor  and MHT series linear motors guarantee higher stability and superior synchronization at low speeds.

Contact us to get a quote:

Phone:+86-18962406535   E-mail: sales@autolinearmotion.com